Data/hora: 09/06/2024 13:20:59

Provedor de dados: | 5
País: | France
Título: | Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors
Autores: | Baudet, Emeline; Sergent, M.; Nemec, P.; Cardinaud, C.; Rinnert, Emmanuel; Michel, K.; Jouany, L.; Bureau, B.; Nazabal, V.
Data: | 2017-06
Ano: | 2017
Resumo: | The development of the optical bio-chemical sensing technology is an extremely important scientific and technological issue for diagnosis and monitoring of diseases, control of industrial processes, environmental detection of air and water pollutants. Owing to their distinctive features, chalcogenide amorphous thin films represent a keystone in the manufacture of middle infrared integrated optical devices for a sensitive detection of biological or environmental variations. Since the chalcogenide thin films characteristics, i. e. stoichiometric conformity, structure, roughness or optical properties can be affected by the growth process, the choice and control of the deposition method is crucial. An approach based on the experimental design is undoubtedly a way to be explored allowing fast optimization of chalcogenide film deposition by means of radio frequency sputtering process. Argon (Ar) pressure, working power and deposition time were selected as potentially the most influential factors among all possible. The experimental design analysis confirms the great influence of the Ar pressure on studied responses: chemical composition, refractive index in near-IR (1.55 mu m) and middle infrared (6.3 and 7.7 mu m), band-gap energy, deposition rate and surface roughness. Depending on the intended application and therefore desired thin film characteristics, mappings of the experimental design meaningfully help to select suitable deposition parameters.
Tipo: | Text
Idioma: | Inglês

Identificador:

http://archimer.ifremer.fr/doc/00390/50119/50725.pdf

DOI:10.1038/s41598-017-03678-w

http://archimer.ifremer.fr/doc/00390/50119/

Editor: | Nature Publishing Group
Formato: | application/pdf
Fonte: | Scientific Reports (2045-2322) (Nature Publishing Group), 2017-06 , Vol. 7 , N. 3500 , P. 1-14

Fonte:

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