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Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors ArchiMer
Baudet, Emeline; Sergent, M.; Nemec, P.; Cardinaud, C.; Rinnert, Emmanuel; Michel, K.; Jouany, L.; Bureau, B.; Nazabal, V..
The development of the optical bio-chemical sensing technology is an extremely important scientific and technological issue for diagnosis and monitoring of diseases, control of industrial processes, environmental detection of air and water pollutants. Owing to their distinctive features, chalcogenide amorphous thin films represent a keystone in the manufacture of middle infrared integrated optical devices for a sensitive detection of biological or environmental variations. Since the chalcogenide thin films characteristics, i. e. stoichiometric conformity, structure, roughness or optical properties can be affected by the growth process, the choice and control of the deposition method is crucial. An approach based on the experimental design is undoubtedly a...
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Ano: 2017 URL: http://archimer.ifremer.fr/doc/00390/50119/50725.pdf
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RF sputtered amorphous chalcogenide thin films for surface enhanced infrared absorption spectroscopy ArchiMer
Verger, F.; Nazabal, V.; Colas, Florent; Nemec, P.; Cardinaud, C.; Baudet, E.; Chahal, R.; Rinnert, Emmanuel; Boukerma, Kada; Peron, Isabelle; Deputier, S.; Guilloux-viry, M.; Guin, J. P.; Lhermite, H.; Moreac, A.; Compere, Chantal; Bureau, Bruno.
The primary objective of this study is the development of transparent thin film materials in the IR enabling strong infrared absorption of organic compounds in the vicinity of metal nanoparticles by the surface plasmon effect. For developing these optical micro-sensors, hetero-structures combining gold nanoparticles and chalcogenide planar waveguides are fabricated and adequately characterized. Single As2S3 and Ge25Sb10Se65 amorphous chalcogenide thin films are prepared by radio-frequency magnetron sputtering. For the fabrication of gold nanoparticles on a chalcogenide planar waveguide, direct current sputtering is employed. Fabricated single layers or hetero-structures are characterized using various techniques to investigate the influence of deposition...
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Ano: 2013 URL: http://archimer.ifremer.fr/doc/00170/28094/26679.pdf
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Structural analysis of RF sputtered Ge-Sb-Se thin films by Raman and X-ray photoelectron spectroscopies ArchiMer
Baudet, E.; Cardinaud, C.; Girard, A.; Rinnert, Emmanuel; Michel, K.; Bureau, B.; Nazabal, V..
Chalcogenide thin films (GeSe2)100 − x(Sb2Se3)x (with x = 10 and 50) were deposited by Radio-frequency (RF) magnetron sputtering. In order to study the impact of Ar pressure on the structure and the composition of selenide thin films structural properties of thin films and targets were investigated by means of Raman scattering spectroscopy and X-ray photoelectron spectroscopy (XPS). Under low pressure (5 · 10− 3 mbar), the increase of wrong bonds like Ge(Sb)-Ge(Sb) was confirmed by Raman and also XPS for both composition. The observed structural changes with Ar pressure are linked with modification of the composition of the selenide films analyzed by EDS and XPS. Furthermore for higher Ar pressure (5 · 10− 2 mbar), RF sputtered thin film and target...
Tipo: Text Palavras-chave: Chalcogenide glass; Thin films; Radio-frequency magnetron sputtering; Raman spectroscopy; X-ray photoelectron spectroscopy; Structure.
Ano: 2016 URL: http://archimer.ifremer.fr/doc/00334/44521/46570.pdf
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