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| Baudet, Emeline; Gutierrez-arroyo, A.; Baillieul, Marion; Charrier, J.; Němec, P.; Bodiou, L.; Lemaitre, J.; Rinnert, Emmanuel; Michel, K.; Bureau, B.; Adam, J. L.; Nazabal, V.. |
| The detection of molecules dissolved in liquid medium can be envisaged by means of an optical integrated sensor operating in middle infrared range. The intended sensor is composed of a cladding and a guiding selenide sputtered layers transparent in middle infrared. Hence, Ge-Sb-Se thin films were selected in view of tailored refractive index contrast, successfully deposited by radio frequency magnetron sputtering and characterized. To maximize the evanescent field at a wavelength of 7.7 µm, a suitable selenide waveguide allowing measuring the optical transmitted power was designed by performing computer simulations based on the effective index method enabling single-mode propagation for a waveguide width between 8 and 12 µm. Selenide sputtered films were... |
| Tipo: Text |
Palavras-chave: Optical sensing and sensors; Mid-infrared; Integrated optics devices; Chalcogenide glasses; Thin films. |
| Ano: 2017 |
URL: http://archimer.ifremer.fr/doc/00389/50014/50603.pdf |
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| Baudet, Emeline; Gutierrez-arroyo, A.; Nemec, P.; Bodiou, L.; Lemaitre, J.; De Sagazan, O.; Lhermitte, H.; Rinnert, Emmanuel; Michel, K.; Bureau, B.; Charrier, J.; Nazabal, V.. |
| A micro-sensor based on selenide glasses for evanescent wave detection in mid-infrared spectral range was designed and fabricated. Ge-Sb-Se thin films were successfully deposited by radio-frequency magnetron sputtering. In order to characterize them spectroscopic ellipsometry, atomic force microscopy and contact angle measurements were employed to study near and middle infrared refractive index, surface roughness and the wettability, respectively. Selenide sputtered films were micro-patterned by means of reactive ion etching with inductively coupled plasma process enabling single-mode propagation at a wavelength of 7.7 µm for a waveguide width between 8 and 12 µm. Finally, optical waveguide surface was functionalized by deposition of a hydrophobic polymer,... |
| Tipo: Text |
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| Ano: 2016 |
URL: https://archimer.ifremer.fr/doc/00346/45709/45337.pdf |
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