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| Baudet, Emeline; Gutierrez-arroyo, A.; Nemec, P.; Bodiou, L.; Lemaitre, J.; De Sagazan, O.; Lhermitte, H.; Rinnert, Emmanuel; Michel, K.; Bureau, B.; Charrier, J.; Nazabal, V.. |
| A micro-sensor based on selenide glasses for evanescent wave detection in mid-infrared spectral range was designed and fabricated. Ge-Sb-Se thin films were successfully deposited by radio-frequency magnetron sputtering. In order to characterize them spectroscopic ellipsometry, atomic force microscopy and contact angle measurements were employed to study near and middle infrared refractive index, surface roughness and the wettability, respectively. Selenide sputtered films were micro-patterned by means of reactive ion etching with inductively coupled plasma process enabling single-mode propagation at a wavelength of 7.7 µm for a waveguide width between 8 and 12 µm. Finally, optical waveguide surface was functionalized by deposition of a hydrophobic polymer,... |
| Tipo: Text |
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| Ano: 2016 |
URL: https://archimer.ifremer.fr/doc/00346/45709/45337.pdf |
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