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| Baudet, Emeline; Gutierrez-arroyo, A.; Nemec, P.; Bodiou, L.; Lemaitre, J.; De Sagazan, O.; Lhermitte, H.; Rinnert, Emmanuel; Michel, K.; Bureau, B.; Charrier, J.; Nazabal, V.. |
| A micro-sensor based on selenide glasses for evanescent wave detection in mid-infrared spectral range was designed and fabricated. Ge-Sb-Se thin films were successfully deposited by radio-frequency magnetron sputtering. In order to characterize them spectroscopic ellipsometry, atomic force microscopy and contact angle measurements were employed to study near and middle infrared refractive index, surface roughness and the wettability, respectively. Selenide sputtered films were micro-patterned by means of reactive ion etching with inductively coupled plasma process enabling single-mode propagation at a wavelength of 7.7 µm for a waveguide width between 8 and 12 µm. Finally, optical waveguide surface was functionalized by deposition of a hydrophobic polymer,... |
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| Ano: 2016 |
URL: https://archimer.ifremer.fr/doc/00346/45709/45337.pdf |
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| Verger, F.; Nazabal, V.; Colas, Florent; Nemec, P.; Cardinaud, C.; Baudet, E.; Chahal, R.; Rinnert, Emmanuel; Boukerma, Kada; Peron, Isabelle; Deputier, S.; Guilloux-viry, M.; Guin, J. P.; Lhermite, H.; Moreac, A.; Compere, Chantal; Bureau, Bruno. |
| The primary objective of this study is the development of transparent thin film materials in the IR enabling strong infrared absorption of organic compounds in the vicinity of metal nanoparticles by the surface plasmon effect. For developing these optical micro-sensors, hetero-structures combining gold nanoparticles and chalcogenide planar waveguides are fabricated and adequately characterized. Single As2S3 and Ge25Sb10Se65 amorphous chalcogenide thin films are prepared by radio-frequency magnetron sputtering. For the fabrication of gold nanoparticles on a chalcogenide planar waveguide, direct current sputtering is employed. Fabricated single layers or hetero-structures are characterized using various techniques to investigate the influence of deposition... |
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| Ano: 2013 |
URL: http://archimer.ifremer.fr/doc/00170/28094/26679.pdf |
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| Baudet, Emeline; Sergent, M.; Nemec, P.; Cardinaud, C.; Rinnert, Emmanuel; Michel, K.; Jouany, L.; Bureau, B.; Nazabal, V.. |
| The development of the optical bio-chemical sensing technology is an extremely important scientific and technological issue for diagnosis and monitoring of diseases, control of industrial processes, environmental detection of air and water pollutants. Owing to their distinctive features, chalcogenide amorphous thin films represent a keystone in the manufacture of middle infrared integrated optical devices for a sensitive detection of biological or environmental variations. Since the chalcogenide thin films characteristics, i. e. stoichiometric conformity, structure, roughness or optical properties can be affected by the growth process, the choice and control of the deposition method is crucial. An approach based on the experimental design is undoubtedly a... |
| Tipo: Text |
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| Ano: 2017 |
URL: http://archimer.ifremer.fr/doc/00390/50119/50725.pdf |
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