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	Provedor de dados ArchiMer (1) Autor Baudet, E. (1) Bureau, B. (1) Cardinaud, C. (1) Girard, A. (1) Michel, K. (1) Nazabal, V. (1) Rinnert, Emmanuel (1) Mais... Palavra-chave Chalcogenide glass (1) Radio-frequency magnetron sputtering (1) Raman spectroscopy (1) Structure (1) Thin films (1) X-ray photoelectron spectroscopy (1) Mais... Tipo do documento Text (1) Ano 2016 (1) País France (1) Idioma Inglês (1)		Ordenar por:  Relevância Autor Título Ano Registros recuperados: 1 Primeira ... 1 ... Última Structural analysis of RF sputtered Ge-Sb-Se thin films by Raman and X-ray photoelectron spectroscopies ArchiMer Baudet, E.; Cardinaud, C.; Girard, A.; Rinnert, Emmanuel; Michel, K.; Bureau, B.; Nazabal, V.. Chalcogenide thin films (GeSe2)100 − x(Sb2Se3)x (with x = 10 and 50) were deposited by Radio-frequency (RF) magnetron sputtering. In order to study the impact of Ar pressure on the structure and the composition of selenide thin films structural properties of thin films and targets were investigated by means of Raman scattering spectroscopy and X-ray photoelectron spectroscopy (XPS). Under low pressure (5 · 10− 3 mbar), the increase of wrong bonds like Ge(Sb)-Ge(Sb) was confirmed by Raman and also XPS for both composition. The observed structural changes with Ar pressure are linked with modification of the composition of the selenide films analyzed by EDS and XPS. Furthermore for higher Ar pressure (5 · 10− 2 mbar), RF sputtered thin film and target... Tipo: Text Palavras-chave: Chalcogenide glass; Thin films; Radio-frequency magnetron sputtering; Raman spectroscopy; X-ray photoelectron spectroscopy; Structure. Ano: 2016 URL: http://archimer.ifremer.fr/doc/00334/44521/46570.pdf Registros recuperados: 1 Primeira ... 1 ... Última

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