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Structural analysis of RF sputtered Ge-Sb-Se thin films by Raman and X-ray photoelectron spectroscopies ArchiMer
Baudet, E.; Cardinaud, C.; Girard, A.; Rinnert, Emmanuel; Michel, K.; Bureau, B.; Nazabal, V..
Chalcogenide thin films (GeSe2)100 − x(Sb2Se3)x (with x = 10 and 50) were deposited by Radio-frequency (RF) magnetron sputtering. In order to study the impact of Ar pressure on the structure and the composition of selenide thin films structural properties of thin films and targets were investigated by means of Raman scattering spectroscopy and X-ray photoelectron spectroscopy (XPS). Under low pressure (5 · 10− 3 mbar), the increase of wrong bonds like Ge(Sb)-Ge(Sb) was confirmed by Raman and also XPS for both composition. The observed structural changes with Ar pressure are linked with modification of the composition of the selenide films analyzed by EDS and XPS. Furthermore for higher Ar pressure (5 · 10− 2 mbar), RF sputtered thin film and target...
Tipo: Text Palavras-chave: Chalcogenide glass; Thin films; Radio-frequency magnetron sputtering; Raman spectroscopy; X-ray photoelectron spectroscopy; Structure.
Ano: 2016 URL: http://archimer.ifremer.fr/doc/00334/44521/46570.pdf
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Development of an evanescent optical integrated sensor in the mid-infrared for detection of pollution in groundwater or seawater ArchiMer
Baudet, Emeline; Gutierrez-arroyo, A.; Baillieul, Marion; Charrier, J.; Němec, P.; Bodiou, L.; Lemaitre, J.; Rinnert, Emmanuel; Michel, K.; Bureau, B.; Adam, J. L.; Nazabal, V..
The detection of molecules dissolved in liquid medium can be envisaged by means of an optical integrated sensor operating in middle infrared range. The intended sensor is composed of a cladding and a guiding selenide sputtered layers transparent in middle infrared. Hence, Ge-Sb-Se thin films were selected in view of tailored refractive index contrast, successfully deposited by radio frequency magnetron sputtering and characterized. To maximize the evanescent field at a wavelength of 7.7 µm, a suitable selenide waveguide allowing measuring the optical transmitted power was designed by performing computer simulations based on the effective index method enabling single-mode propagation for a waveguide width between 8 and 12 µm. Selenide sputtered films were...
Tipo: Text Palavras-chave: Optical sensing and sensors; Mid-infrared; Integrated optics devices; Chalcogenide glasses; Thin films.
Ano: 2017 URL: http://archimer.ifremer.fr/doc/00389/50014/50603.pdf
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